소프트에피는 고객이 요청하는 다양한 GaN 및 AlGaN template 기판을 생산합니다.

AlGaN Template

AlGaN Template

- Substrate : Patterned Sapphire Substrate

- Growth Equipment : MOCVD

- Wavelength : ~ 350 nm

※ XRD Quality

- (002) : < 250 arcsec

- (102) : < 350 arcsec

GaN Template

Semipolar GaN Template

- Substrate : Patterned Sapphire Substrate

- Wavelength : ~ 367nm

* Plane : (11-22)

Nonpolar GaN Template

- Substrate : Patterned Sapphire Substrate

- Wavelength : ~ 367nm

* Plane : (11-20)

c-plane GaN Template

- Substrate : Planner Sapphire Substrate

- Wavelength : ~ 367nm

- Plane : c-plane

- Type : un-doped, n-type